![Michael W. Russell, Ph.D.](/-/media/images/team/r/russell_michael/russell_michael_large.png?rev=6a0fde80a579412495285531a6522a9d&sc_lang=nl)
Profile
Michael W. Russell, Ph.D. is a registered patent attorney with more than 20 years of experience. He focuses his practice on patent preparation and prosecution, patentability and risk assessment evaluations, portfolio management, and client counseling. He has prepared and prosecuted more than 200 issued U.S. patents across a wide range of technical disciplines, including semiconductor device processing, energy storage, materials processing, optics, sensors, filtration, catalysis, and paper products.
His previous experience includes work as a process development engineer developing chemical vapor deposition and integration processes for ferroelectric thin films for non-volatile memory applications. Michael was awarded a J. William Fulbright Fellowship at the National University of Rosario in Rosario, Argentina, and was also awarded a National Research Council Postdoctoral Fellowship at the Naval Research Laboratory in Washington, D.C. Michael is a former patent examiner with the United States Patent & Trademark Office and is listed as a co-inventor on 11 U.S. patents.
Capabilities
Experience
- 7,862,857; 7,705,382; 7,344,589; 6,984,417 and 6,316,797 – “Scalable Lead Zirconium Titanate (PZT) Thin Film Material and Deposition Method, and Ferroelectric Memory Device Structures Comprising such Thin Film Material”
- 7,012,292 – “Oxidative Top Electrode Deposition Process, and Microelectronic Device Structure”
- 6,699,402 – “Chemical Mechanical Polishing Compositions for CMP Removal of Iridium Thin Films”
- 6,395,194 – “Chemical Mechanical Polishing Compositions and Process for the CMP Removal of Iridium Thin Films Using Same”
- 6,346,741 – “Compositions and Structures for Chemical Mechanical Polishing of FeRAM Capacitors and Method of Fabricating FeRAM Capacitors Using Same”
- 6,184,550 – “Ternary Nitride-Carbide Barrier Layers”
- 6,100,200 – “Sputtering Process for the Conformal Deposition of a Metallization or Insulating Layer”
°The above representations were handled by Mr. Russell prior to his joining Greenberg Traurig, LLP.
- Patent Examiner, U.S. Patent and Trademark Office, 1994
- Intellectual Property Counsel, Corning, Inc., 2008-2015
- Process Development Engineer, ATMI, 1997-2000
- Fulbright Fellow, University of Rosario, Argentina, 1996
- National Research Council Postdoctoral Research Fellow, Naval Research Laboratory, 1994-1996
Credentials
- J.D., Georgetown University Law Center
- Ph.D., Materials Science & Engineering, Cornell University
- M.S., Materials Science & Engineering, Cornell University
- S.B., Massachusetts Institute of Technology
- District of Columbia
- Virginia
- U.S. Patent and Trademark Office
- Spanish, Conversational